University and Industry Research
Material science, chemistry, physics and engineering are critical disciplines required in the electronics ecosystem we serve. Universities and industry researchers investigate and study complex technical challenges to advance knowledge through the development of scientific theories, concepts and ideas. At KLA, we develop, manufacture and support specialized instruments in the pursuit of knowledge and exploratory discovery in university research and development environments.
MicroSense® EasyVSM™
Vibrating Sample Magnetometer System
MicroSense® EasyVSM™ vibrating sample magnetometer systems measure the magnetic moment and coercivity of thin films and the magnetic properties of liquids, powders and bulk samples. High sensitivity and exceptional low and high field performance are ideal for the characterization of many types of magnetic materials, including thin films, solids, liquids, powders, rocks and more. Ease of use, speed, versatility, expandability and optional automatic sample loading make this the system of choice for magnetic research labs as well as production facilities for unattended 24x7 operations.
- Magneto-electric option measures the magnetic moment of materials as a function of field, angle, temperature, time and applied electric voltage
- Magneto-Optical Kerr Effect (MOKE) option offers the ability to do very fast longitudinal or perpendicular Kerr measurements. Switch between VSM and MOKE in minutes.
- Torque option measures the torque of materials as a function of rotation angle and applied field, to determine the sample anisotropy.
- Magneto Resistance option measures the resistance of thin film samples as a function of the magnetic field, temperature and angle.
- Ferromagnetic resonance (FMR) options 2-8, 2-18 GHz, 2-40 GHz, and 2-60 GHz options available. Switch between VSM and FMR in minutes. Extracts Ms, damping and gyromagnetic ratio.
- Automatic Rotation: +/- 540° or -100° to 900° always included
- Vector Signal Detection
- Torque
- Magneto Resistance: AC and DC
- Magneto Electric
- Magneto Optic Kerr Effect (MOKE): In-Plane and perpendicular (Polar)
- FMR: 2-8 GHz, 2-18 GHz, 2-40 GHz and 2-60 GHz
- Optional Automatic Sample Loading (vertical or horizontal). 6 Cassettes, 96 samples total
MicroSense EasyVSM systems offer the speed, sensitivity, and flexibility to support your magnetic measurement requirements.
With the lowest noise floor without signal averaging and the largest sample space when using the temperature option, the MicroSense EasyVSM systems support measurements that are difficult or slower on other systems. Low field noise and class-leading field resolution enable the measurement of very low coercivity samples or low coercivity magnetic layers while simultaneously allowing the application of a high saturating field in the same measurement.
Several MicroSense EasyVSM models are available with different maximum magnetic field strengths to meet a wide range of metrology requirements. Options include Sample Temperature control, Vector and Anisotropy measurements, Magneto Resistance measurements (AC and DC options available), Magneto Electric Measurements, Ferromagnetic resonance (FMR) and Magneto Optic Kerr Effect (MOKE) measurements.
The unique, automatic sample-loading option offers the capability for production quality control measurements or high-volume sample measurements with minimal operator effort.
- Space-saving, flexible design with all components mounted on wheels for easy lab configuration
- Versatile options: Vector, MOKE, FMR, AC&DC Magneto-Resistance and Magneto Electric
- Highest field electromagnet-based VSM, up to 3.7 Tesla
- Highest sensitivity (lowest noise) without signal averaging
- Fast with high field sweep rates of up to 1 T/s and up to 1000 points/second data collection
- 10 mm ID of continuous range temperature chamber allows for larger samples and ~2x more signal
- Up to 100K/minute temperature change rate gets you to the measurement temperature faster
- Standard automatic sample rotation
- Optional automatic sample loading
- Temperature options from 4.2K to 1300K
- Oven/cryostat always installed on the measurement system and ready for use
- Air-cooled magnet power supply eliminates the risk of condensation on high-power electronics
![MicroSense EasyVSM product.](webp/microsense_easyvsm_kla_branded.webp)
MiscroSense® EasyVSM™
Magnetic thin films, MRAM, Hard disk drive, Permanent magnets, Solid samples, Magnetic sensor materials, Magnetic powders, liquids, toner, ink, etc., Rock and soil samples, Material characterization
KLA Instruments™
KLA Instruments™ supports academic research and other innovators by delivering trusted measurements. The KLA Instruments portfolio includes:
- Nanoindenters
- Thin-film reflectometers
- Sheet-resistance tools
- Optical and stylus profilers
- Defect inspection and metrology systems
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